Nanoimprint Lithography: Principles, Processes and Materials (Nanotechnology Science and Technology) Download
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Nanoimprint Lithography: Principles, Processes and Materials (Nanotechnology Science and Technology) Description
.Lithography, the fundamental fabrication process of semiconductor devices, has been playing a critical role in micro-nanofabrication technologies and manufacturing of Integrated Circuits (IC). This book gives fresh insight to NIL, one of the most promising low-cost, high-throughput technologies for manufacturing nanostructures.
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